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Fundamentals of Microfabrication and Nanotechnology – 3rd Edition
Vol 1: Solid-State Physics, Fluidics, and Analytical Techniques in Micro and Nanotechnology
Vol 2: Manufacturing Techniques for Microfabrication and Nanotechnology
Vol 3: From MEMS to Bio-MEMS and Bio-NEMS
Author(s) : Marc J. Madou
Volumes I, II and III are sold separately.
File Specification for Vol 1 (I)
File Specification for Vol 2 (II)
File Specification for Vol 3 (III)
Payment for Vol 1 (I)
Payment for Vol 2 (II)
Payment for Vol 3 (III)