Fundamentals of Microfabrication and Nanotechnology – Marc Madou

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Fundamentals of Microfabrication and Nanotechnology – 3rd Edition

Vol 1: Solid-State Physics, Fluidics, and Analytical Techniques in Micro and Nanotechnology

Vol 2: Manufacturing Techniques for Microfabrication and Nanotechnology

Vol 3: From MEMS to Bio-MEMS and Bio-NEMS

Author(s) : Marc J. Madou

Download Solid-State Physics, Fluidics, and Analytical Techniques in Micro and Nanotechnology Marc Madou

Download Manufacturing Techniques for Microfabrication and Nanotechnology by Marc Madou

Download From MEMS to Bio-MEMS and Bio-NEMS by Marc by Madou

Volumes I, II and III are sold separately.

File Specification for Vol 1 (I)

Extension PDF
Pages 646
Size 22 MB

File Specification for Vol 2 (II)

Extension PDF
Pages 658
Size 21.9 MB

File Specification for Vol 3 (III)

Extension PDF
Pages 642
Size 19.9 MB

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